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OEM
Inherent Frequency
1.0-2.0Hz, vertically; 1.0-1.5Hz, horizontall
Vibration Isolation Structur
Air springs & pendulum rod
Vibration Damping Typ
Porous quasi-laminar flow damping element with diffuse
Working Air Pressur
0.2-0.4MPa
Compressed Air Sourc
Silent compressor (noise level) <50dB
Re-leveling Accurac
±0.1mm
Table Top Flatnes
≤0.05mm/m²
Surfaced Roughnes
≤0.8μm, matt surface finis